茂丰光电

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FS-SPX is feedback stage with 5nm resolution positioning.

In-house optical linear encoder are built-in at the center of stage to detect position.

Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.

There are two types of the stage which travel of 20mm and 50mm.

※1：Minimum resolution and position repeatability accuracy for built-in scale read.

※2：Scale cable comes directly out of the stage. Please prepare "extension cable for scale" separately if 2m or longer cable are needed.

资料下载：PDF‍

FS-1020SPX FS-1050SPX