- 产品详情
- 产品参数
由于日元汇率一直变动，所有日本sigma光机的相关产品，价格填写为零，具体价格需要和客服咨询
FS-PX is feedback stage with 10nm resolution positioning.
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are five types of the stages. It is ideal for collecting the data in a wide range or for performing precise positioning and movement of a sample on a single stage by the large travel range.
※1：Minimum resolution and position repeatability accuracy for built-in scale read.
※2：Running parallelism per 100mm travel.
※3：Scale cable comes directly out of the stage. Please prepare "extension cable for scale" separately if 2m or longer cable
资料下载：PDF
FS-1050PX FS-1020PX FS-1100PX FS-3150PX FS-3200PX