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FS-X is feedback stage with sub-micron resolution positioning.
In-house optical linear encoder are built-in at the center of stage to detect position.
Positioning to target position, positioning repeatability and holding the position with high resolution is achieved by feedback control using position information of encoder.
There are seven types of the stages. It is ideal for collecting the data in a wide range or for performing precise positioning and movement of a sample on a single stage by the large travel range.
※1：Minimum resolution and position repeatability accuracy for built-in scale read.
※2：Running parallelism per 100mm travel.
※3：Scale cable comes directly out of the stage. Please prepare "extension cable for scale" separately if 2m or longer cable are needed.
※1：Minimum resolution and position repeatability accuracy for built-in scale read.
※2：Running parallelism per 100mm travel.
※3：Scale cable comes directly out of the stage. Please prepare "extension cable for scale" separately if 2m or longer cable are needed.
资料下载：PDF
FS-1050X FS-3200X FS-3300X FS-3400X